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Reno Sub-Systems Launches GenMatch™ Series of Integrated RF Power Systems for Semiconductor Manufacturing at 7nm or Below

RENO, Nev., May 13, 2021 (GLOBE NEWSWIRE) -- Reno Sub-Systems (Reno), a developer of high performance radio frequency (RF) matching networks for leading-edge nanoscale semiconductor manufacturing, today introduced its new GenMatch™ Series that integrates the company’s proven solid-state Electronic Variable Capacitor (EVC™) RF match and Precis™ generator technologies into a single unit. The systems have a footprint similar to a match alone, saving space on the process tool, and are faster, more repeatable and more reliable, with lower cost of ownership. GenMatch™ systems are ideal for leading-edge etch and deposition applications in semiconductor manufacturing, where level-to-level pulsing and short RF on-times are critical to meet performance requirements at the most advanced nodes.

“Reno has a strong track record of bringing novel RF match technology to market, and the GenMatch™ is no exception,” said John Voltz, senior vice president of business development at Reno. “The high reliability of our EVC™ all-solid-state match equals RF generator reliability, making it now economical to put both in the same package. The GenMatch™ is a true RF power system that delivers plug-and-play performance, a first for plasma processing in advanced semiconductor manufacturing.”

The GenMatch™ platform covers powers from 500W to 10kW and frequencies from 400kHz to 60MHz. The generator supports level-to-level pulsing, while the RF matching network matches impedance on each pulse, meaning every wafer sees the same frequency, unlike frequency sweep. AI and machine learning using the matching network’s extensive sensor and sampling capability further enhance system performance.

Benefits offered by the GenMatch™ Series include:

With match and generator about the same size as Reno match alone, the combined unit saves valuable space on the process tool. Additional cost savings are achieved, as only one location is required to facilitize power, water, etc. All-digital units allow for multiple communication protocols, Ethernet, EtherCAT and DeviceNet.

About Reno Sub-Systems
Reno Sub-Systems Inc. has developed new and disruptive technologies for the semiconductor and advanced microelectronic industries. Leveraging its patented technologies, Reno has demonstrated the highest performance radio frequency matching networks for leading-edge nanoscale manufacturing processes. Reno has generated strong customer demand based on on-tool performance data, which has allowed the company to transition from technology and product development to high volume adoption within two years. For more information, please visit https://renosubsystems.com.

A photo accompanying this announcement is available at https://www.globenewswire.com/NewsRoom/AttachmentNg/3cffe8c8-f3bf-4dc6-8ff0-d00be113e2a6


Company Contact:
Reno Sub-Systems Inc.
John Voltz
(215) 479-9269
jvoltz@renosubsystems.com

Media:
Kiterocket
Rayan Vatti
(203) 892-7133
rvatti@kiterocket.com

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Reno GenMatch™

The Reno GenMatch™ integrates the company’s proven solid-state Electronic Variable Capacitor (EVC™) RF match and Precis™ generator technologies into a single unit.