*** Editors’ Note 3: Quadruple patterning is a multiple patterning technology that is used in high-end integrated circuit (IC) manufacturing, especially in the photolithography process. There are many different ways of deploying a multiple patterning technology, but the common goal is to extend the patterning resolution and enhance the feature density beyond that of conventional lithography.
**** Editors’ Note 4: Dielectric materials are characterized by very low electrical conductivity in which an electric field can be sustained with minimal leakage. In semiconductor manufacturing, dielectric materials are used in many different steps. A major application of dielectric materials in Samsung’s 10nm-class DRAM manufacturing is to insulate capacitors and prevent electric leakage, which will result in a significant increase in capacitance and higher cell performance.
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